Effects of ferroelectric switching on the piezoelectric small-signal response (d33) and electrostriction (M33) of lead zirconate titanate thin films
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چکیده
منابع مشابه
Measurements of Piezoelectric Coefficient d33 of Lead Zirconate Titanate Thin Films Using a Mini Force Hammer
s of 2007 Conference on Implantable Auditory Prostheses, July 15–20,
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Piezoelectric properties of three sol-gel derived Pb Zr0.53Ti0.47 O3 thin film specimens of different thicknesses integrated onto Pt/Ti/SiO2 Si substrates are investigated to delineate the influence of residual stress on the strain-field response characteristics from other thickness related effects. Residual tensile stresses are determined from wafer curvature measurements for films ranging in ...
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Piezoelectric properties of three sol-gel derived Pb Zr0.53Ti0.47 O3 thin film specimens of different thicknesses integrated onto Pt/Ti/SiO2 Si substrates are investigated to delineate the influence of residual stress on the strain-field response characteristics from other thickness related effects. Residual tensile stresses are determined from wafer curvature measurements for films ranging in ...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2004
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.1690098